| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent sticking of substrates readily and reliably and to keep cleanness of substrate surfaces by providing support members between the substrate and the neighboring substrate or an inner wall of a carrier. <P>SOLUTION: A carrier 1 for substrate transfer includes support members 6 in global shapes for preventing sticking of substrates, which is disposed between the neighboring substrates out of the plural substrates 3 and between an inner wall surface of the carrier and the substrate 3. These global support members 6 are connected between adjacent grooves 51 onto each of side plates 5 of the carrier which oppose each other, and provided at the center position of the substrate 3 and at its corresponding upper position right over it in the height direction. Thereby, the sticking of the substrates 3 themselves and/or the sticking of the inner wall of the carrier and the substrate 3 can be prevented, even when the substrate 3 bends beyond a pitch of the grooves of the carrier, during a cleaning process and/or a desiccation process. <P>COPYRIGHT: (C)2012,JPO&INPIT |
