ACOUSTIC SENSOR, ACOUSTIC TRANSDUCER, MICROPHONE USING THE ACOUSTIC TRANSDUCER, AND METHOD FOR PRODUCING ACOUSTIC TRANSDUCER
摘要
<p>Disclosed is an acoustic sensor (1), wherein a conductive vibrating membrane (14) and an upper fixed electrode plate (5) are arranged on the upper face of a silicon substrate (11) so that an air gap (22) is provided between the conductive vibrating membrane (14) and the upper fixed electrode plate (5), and impurities are added on the surface of the silicon substrate (11).</p>
