| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric type speaker which can manufacture a piezoelectric type speaker easily. <P>SOLUTION: A manufacturing method for a piezoelectric type speaker comprises: a piezoelectric element layer formation process which forms in a high-temperature atmosphere exceeding the normal temperature a piezoelectric element layer which has on one principal surface of the substrate a first electrode layer, a piezoelectric layer directly connected to the first electrode layer, and the second electrode layer directly connected to the piezoelectric layer; and a cooling process which brings a laminate containing the piezoelectric element layer to the normal temperature in order to bend the laminate by the coefficient difference of thermal expansion of each layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
