摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass etching composition, a composition for glass polishing processing and a glass polishing processing method, to improve grindability, reduce surface roughness by enhancing grindability, improve magnetic parametric performance, reduce scratches, reduce scratches (flaws) on surfaces of hard disks, improve yields, improve removability of grinding dust, reduce the amounts of grinding dust adhered onto the surfaces of hard disks and improve the yields. <P>SOLUTION: The glass etching composition is an aqueous solution containing an alkali compound and at least one kind of compound selected from the group consisting of (1) an alcohol having ≥3 alcoholic hydroxyl groups in the molecule, (2) an amine compound having ≥2 alcoholic hydroxyl groups in the molecule and (3) a phosphorus-based chelating agent. A composition for glass polishing processing and a glass polishing processing method using the same are also provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |