| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment liquid purification device capable of efficiently collecting not only a deposited foreign matter but also a floating foreign matter from a treatment liquid collected in a treatment liquid tank by a simpler and more reasonable configuration. <P>SOLUTION: This treatment liquid purification device includes the treatment liquid tank 2, includes a hopper 6 guiding the collection treatment liquid collected from a treatment liquid supplied part 1 into the treatment liquid tank 2, includes a solid-liquid separator 3 performing the solid-liquid separation of the treatment liquid, includes a pump 40 sucking the foreign matter deposited in the bottom of the treatment liquid tank 2 from a treatment liquid collection port formed in a deep part of the treatment liquid tank together with the treatment liquid and carrying them to the solid-liquid separator 3, and includes a supply part 4 for supplying the treatment liquid applied with the solid-liquid separation to the treatment liquid supplied part 1. The treatment liquid tank 2 is provided with a circulation mechanism F horizontally circulating the treatment liquid in the treatment liquid tank 2, and has a guide G guiding the treatment liquid circulating in the treatment liquid tank 2 to the deep part from a shallow part closer to a liquid surface than the deep part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
