发明名称 |
METHOD AND SYSTEM FOR PACKAGING MEMS DEVICES WITH INCORPORATED GETTER |
摘要 |
Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal. |
申请公布号 |
US2011290552(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US201113208218 |
申请日期 |
2011.08.11 |
申请人 |
PALMATEER LAUREN;CUMMINGS WILLIAM J.;GALLY BRIAN;CHUI CLARENCE;KOTHARI MANISH;QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
PALMATEER LAUREN;CUMMINGS WILLIAM J.;GALLY BRIAN;CHUI CLARENCE;KOTHARI MANISH |
分类号 |
H01L23/28;B29C65/54 |
主分类号 |
H01L23/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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