| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro that is smaller in size than a conventional one and detects angular velocity with high accuracy. <P>SOLUTION: In a vibration gyro 50, supports (21) of fixing structure portions for detection 2A and 2B are arranged between drive mass sections 13A and 13B that face each other along Y-axis of a rectangular coordinate system with Z-axis in a normal direction to a principal surface of a lid plate 50A. A detection mass section 17A is positioned between the drive mass section 13A and the supports (21), and a detection mass section 17B is positioned between the drive mass section 13B and the supports (21). An interdigital electrode is positioned between the supports 21 and the detection mass section 17A. Another interdigital electrode is positioned between the supports 21 and the detection mass section 17B. <P>COPYRIGHT: (C)2012,JPO&INPIT |
