DIELECTRIC-LAYER-COATED SUBSTRATE, AND PROCESS AND INSTALLATION FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide new thin film materials that can be used to coat transparent substrates of the glass type, new deposition processes and new installations.

SOLUTION: A substrate (1), for example, a glass substrate is coated with at least one thin dielectric layer. The dielectric layer is deposited by means of cathode sputtering, for example, by means of the cathode sputtering which is assisted by a magnetic field and is preferably reactive in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) from an ion source (4). The dielectric layer which is exposed to the ion beam can be crystallized.

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