| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron microscope, capable of automatically adjusting an optical axis even when the optical axis deviates to the extent that an electron beam position cannot be confirmed on a fluorescent plate after the exchange of a electron source. <P>SOLUTION: By measuring a fluorescent plate current, it is decided whether or not the fluorescent plate is irradiated with the electron beam. In case of no irradiation, by the control of a deflector, the electron beam is moved so that the fluorescent plate is irradiated with the electron beam. In case of irradiation, the deflector is controlled to make a maximum magnitude of the current and a maximum magnitude of brightness obtained from an image of the electron beam with which the fluorescent plate is irradiated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
