发明名称 |
ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND ELECTRON BEAM APPARATUS |
摘要 |
An electron gun includes a cathode, a bias electrode, and an anode disposed along a common axis in order thereof. In the electron gun, an electron emitting surface of the cathode has such a shape that brightness of a crossover is more uniform than that in a case that both a first region including a point on the axis and a second region located outside the first region have a first radius of curvature. |
申请公布号 |
US2011294071(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US201113113667 |
申请日期 |
2011.05.23 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
IMAOKA NOBUO |
分类号 |
G03F7/20;G21K5/00;H01J29/04 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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