摘要 |
Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode. |
申请人 |
LG INNOTEK CO., LTD.;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;PARK, DONGCHAN;YOON, JUNBO;CHOI, DONGHUN;YANG, HYUNHO;CHO, SUNGBAE;SONG, JUYOUNG;LEE, SANGHUN;HAN, CHANGHUN;KIM, CHANGWOOK |
发明人 |
PARK, DONGCHAN;YOON, JUNBO;CHOI, DONGHUN;YANG, HYUNHO;CHO, SUNGBAE;SONG, JUYOUNG;LEE, SANGHUN;HAN, CHANGHUN;KIM, CHANGWOOK |