SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, METHOD OF FLATTENING EDGE OF SUBSTRATE AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate table which can adjust the flatness of a substrate edge.

SOLUTION: A substrate table to support a substrate is disclosed. The substrate table includes a substrate support to support the substrate and to apply a bending force to an edge of the substrate in a first direction. A substrate edge manipulator is provided and is configured to apply a variable bending force to the edge of the substrate in a second direction. The second direction has at least a component opposite in direction to the first direction.

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