ADJUSTABLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOYING SUCH A SYSTEM
摘要
<p>Cathodoluminescence detection system comprising a collecting optic (112), for collecting light radiation coming from a specimen illuminated by a beam of charged particles and reflecting said light radiation onto analysis means, characterized in that it comprises means (606,614-618) for positioning said collecting optic (112) along at least one dimension.</p>
申请公布号
WO2011148073(A1)
申请公布日期
2011.12.01
申请号
WO2011FR50987
申请日期
2011.04.29
申请人
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;KOCIAK, MATHIEU;ZAGONEL, LUIZ FERNANDO;TENCE, MARCEL;MAZZUCCO, STEFANO
