| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum drying apparatus capable of efficiently drying material to be dried in a short period of time. <P>SOLUTION: The vacuum drying apparatus includes: a drying tank 10 for air-tightly storing the material 40 to be dried; a pressure-reducing means 30 for reducing the pressure in the drying tank 10 to set the drying tank in a reduced pressure state; a reduced pressure-releasing means V1 for releasing the reduced pressure state of the drying tank 10; a pressure detection means 14 for detecting a pressure in the drying tank 10; solvent discharging means V4, 53 for discharging liquefied solvent from the drying tank 10 to an outer part; and a control means 60 for controlling the pressure-reducing means 30, reduced pressure-releasing means V1 and solvent discharging means V4, 53, wherein, when the pressure in the drying tank becomes higher than a target pressure P and the lowering speed of the pressure gets to a preset value Δp1 or less during execution of vacuum drying, the reduction in pressure by means of the pressure-reducing means 30 is stopped, the reduced pressure state is released, the liquefied solvent is discharged from the drying tank 10 by the solvent discharging means V4, 53 and, thereafter, the reduction in pressure by means of the pressure-reducing means 30 is restarted again. <P>COPYRIGHT: (C)2012,JPO&INPIT |
