发明名称 |
METHOD AND DEVICE FOR ACTIVE WEDGE ERROR COMPENSATION BETWEEN TWO OBJECTS THAT CAN BE POSITIONED SUBSTANTIALLY PARALLEL TO EACH OTHER |
摘要 |
The invention relates a method and device for expanding the travel of linear actuators that is available during an embossing stroke. The wedge error compensating head (2) comprises a movable part (4), a stationary part (3) and at least three linear actuators (8). Each linear actuator (8) is connected to one of the two parts (3, 4) at one end and to the other of the two parts (4, 3) by wedges (9) at the other end. By means of the wedges (9), it is possible to roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators (8) are only used for precision compensation for the wedge error. In this way, sufficient travel is available for the embossing stroke with the linear actuators. |
申请公布号 |
WO2011098604(A3) |
申请公布日期 |
2011.12.01 |
申请号 |
WO2011EP52141 |
申请日期 |
2011.02.14 |
申请人 |
SUSS MICROTEC LITHOGRAPHY GMBH;HANSEN, SVEN;CONRADI, MATTHIAS;FINK, GEORG |
发明人 |
HANSEN, SVEN;CONRADI, MATTHIAS;FINK, GEORG |
分类号 |
G03F7/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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