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发明名称
POLISHING APPARATUS AND POLISHING METHOD
摘要
申请公布号
KR101088785(B1)
申请公布日期
2011.12.01
申请号
KR20077013603
申请日期
2005.11.15
申请人
发明人
分类号
B24B37/04;B24B37/00;B24B37/005;B24B37/07;B24B37/20;H01L21/304
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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