| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reverse oscar type polishing device capable of easily controlling a polishing amount, and performing stable polishing even if dropping a polishing liquid to a color filter outside an upper platen and polishing the color filter. <P>SOLUTION: In the polishing device, the upper platen 33 comprises an upper platen upper layer 33a and an upper platen lower layer 33b so as to limit a distribution of a load on a lower platen 1 facing the upper platen to only an outer circumferential part of the upper platen, and is provided with a plurality of push-in bolts 31 from an inner face r except the center q of the upper platen upper layer 33a toward an outer circumferential part t as an adjustment mechanism for forming the lower face of the upper platen in a center recessed concave shape 50. An upper platen 43 is formed with a slit 44 dividing the upper platen into two parts in the thickness direction from an inner face except the center toward an outer circumferential part, and provided with a plurality of push-in bolts 41 from the inner face except the center of an upper platen upper half part 43a toward the outer circumferential part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
