| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-electro-machine capacitor microphone. <P>SOLUTION: A micro-electro-machine capacitor microphone (20, 30) solves a stress residual problem and improves a microphone sensitivity. The microphone includes a support (27) and a vibrating film (22). The support (27) supports a central portion of the vibrating film (22), thereby excluding and discharging a stress that the vibrating film (22) generates during a thermal process, maintaining the vibrating film (22) flat, and improving a precision of electrostatic capacitance detection. Furthermore, the microphone may include a rigid vibrating film (32) and an elastic component (33), and the rigid vibrating film (32) is installed on the elastic component (33), so that the rigid vibrating film (32) is moved parallel in the direction of a back electrode (34) by elastic operation of the elastic component (33), an electrostatic capacitance change between the rigid vibrating film (32) and the back electrode (34) is acquired, and a relatively high detection sensitivity is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
