| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a light waveguide device capable of forming a light waveguide having an optical-path conversion mirror with low-cost and high-yield and without creating problems. <P>SOLUTION: A method for manufacturing a light waveguide device includes a step for obtaining a light waveguide L by sequentially forming a first cladding layer 40, a core layer 42, and a second cladding layer 44 on a substrate 10, a step for forming a groove portion 50 which divides the second cladding layer 44 and the core layer 42 by providing an optical-path conversion inclined surface S1 and a sidewall surface S2 which intersects therewith on each side of the light waveguide L, a step for selectively forming a metal layer 60 on an inner surface of the groove portion 50, a step for forming a protective insulating layer 34 which seals the metal layer 60 on the light waveguide L, and a step for obtaining an optical-path conversion mirror M made of the metal layer 60 on the optical-path conversion inclined surface S1 by removing the metal layer 60 formed on the sidewall surface S2 of the groove portion 50 to form a concave portion 70 by processing the protective insulating layer 34 and the light waveguide L in the thickness direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
