| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily and rapidly specify a cause of output abnormality of a laser beam. <P>SOLUTION: In a step S2, monitoring of a temperature near at least one of a position into which the laser beam is incident, a position through which the laser beam passes, a position from which the laser beam is emitted, and a position to which another component on the light path is connected is started, which are the prescribed positions of a plurality of components on the light path of the laser beam of the laser beam machining device. In a step S4, monitoring of output of the laser beam is started. When abnormality of output of the laser beam is detected in a step S6, control is performed so that a temperature in measurement portions are recorded in a recording part in a step S10. This invention is applicable to the laser beam machining device performing various machining. <P>COPYRIGHT: (C)2012,JPO&INPIT |
