| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint device that is advantageous in detecting moire fringes formed on a mark formed on a pattern and a substrate. <P>SOLUTION: The imprint device includes a support 3 which holds a pattern where a mark 4 is formed, a substrate stage 13 which holds a substrate 1 where a mark 5 is formed, a detector 6, and an adjustment portion 12 which adjusts the angle of an optical axis of the detector. The mark 5 includes a lattice pattern having a lattice pitch in both first and second directions which are parallel to and mutually-orthogonal each other on a pattern surface, and the mark 4 includes a lattice pattern having a lattice pitch in the first direction, the mark 4 and mark 5 being different in lattice pitch in the first direction from each other. The detector includes an imaging element and an optical system which forms moire fringes on an imaging surface with light which is obliquely incident on the mark 4, transmitted through the lattice of the mark 4, diffracted by the lattice of the mark 5, and transmitted through the lattice of the mark 4 again. The adjustment portion adjusts the angle in a third direction orthogonal to the pattern surface so that the visibility of the moire fringes formed on the imaging surface exceeds a predetermined value. <P>COPYRIGHT: (C)2012,JPO&INPIT |
