| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor production apparatus capable of producing photoreceptors of different kinds efficiently and at low cost. <P>SOLUTION: The electrophotographic photoreceptor production apparatus for producing an electrophotographic photoreceptor by using a plasma CVD method includes: a reaction container 101 having a reacting space that can be rendered vacuum hermetic and has at least an inside wall constituted by a cylindrical electrode; high-frequency power supply means for exciting a material gas supplied to the reaction space by supplying high frequency power to the cylindrical electrode, thereby generating a glow discharge in the reaction space; and exhaust means for exhausting the reaction space. The cylindrical electrode includes a cylindrical electrode body 102, and a gas supply member 116 which has a gas discharge hole for supplying the material gas to the reacting space formed in the reaction space. The gas supplying member 116 is attachable/detachable to/from the cylindrical electrode body 102. <P>COPYRIGHT: (C)2012,JPO&INPIT |
