| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent deterioration in efficiency even if a position of a three-dimensional camera is varied, when measuring a three-dimensional shape while rotating a stage around a rotation axis. <P>SOLUTION: A controller 30 preliminarily memorizes a coordinate or a vector component of a fixed-point of a stage 10 obtained by measurement with a three-dimensional camera 20 arranged at a first camera point. The controller 30 obtains a camera coordinate conversion factor for coordinate-converting three-dimensional data expressing a three-dimensional shape measured by the three-dimensional camera 20 at a second camera position to three-dimensional data expressing a three-dimensional shape measured by the three-dimensional camera 20 at the first camera position, by using a coordinate or a vector component of the fixed-point of the stage 10 obtained by measurement with the three-dimensional camera 20 arranged at the second camera position different from the first camera position, and the preliminarily memorized coordinate or the vector component of the fixed-point of the stage 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
