摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microchip which has high heat resistance and high chemical resistance and can be produced with the small number of manufacturing steps and to provide a manufacturing method of the microchip. <P>SOLUTION: According to the present invention, a microchip is provided which has a flow channel including an aperture on the surface or on the side surface of a transparent substrate inside thereof. Further, according to the present invention, a microchip is provided for which the modification with the use of a laser is performed, then, a flow channel including an aperture provided on a surface or on the side surface of a transparent substrate inside thereof by isotropic etching. <P>COPYRIGHT: (C)2012,JPO&INPIT |