| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow immediate stop of actuation when air bubbles mix in a tube and control operation by accurately detecting the end of a chemical in a supply pack and the occurrence of blocking on a downstream side. <P>SOLUTION: A tube pump 100 transfers liquid in the tube by deforming the flexible tube 220 in a manner of drawing the same through a drive part A. In a sensor block 30 arranged at a position where the tube is led out to the outside from the drive part A, an end sensor 250 is arranged upstream of the drive part A, and a blocking sensor 260 and a bubble sensor 270/271 are arranged downstream of the drive part A. A CPU 300 makes the drive part A operate by a start instruction, and makes the drive part A stop when the end sensor 250 detects that a tube diameter D becomes below a first threshold Th1, when the blocking sensor 260 detects that the tube diameter D exceeds a second threshold Th2 and when the bubble sensor detects a bubble in the tube. <P>COPYRIGHT: (C)2012,JPO&INPIT |
