发明名称 |
CLOSED CHAMBER WITH FLUID SEPARATION FEATURE |
摘要 |
Selective recovery of excess process fluid from within a closed process chamber is achieved by providing a magnetically drive ring chuck and at least one process fluid collector within the closed process chamber, with the ring chuck and the fluid collector being vertically movable relative to each other. |
申请公布号 |
US2011290283(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US20100787196 |
申请日期 |
2010.05.25 |
申请人 |
OBWEGER RAINER;GLEISSNER ANDREAS;LAM RESEARCH AG |
发明人 |
OBWEGER RAINER;GLEISSNER ANDREAS |
分类号 |
B08B3/04 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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