发明名称 PICKERS
摘要 PURPOSE: A picker device is provided to form a buffer part between a rod part and the first flowing path of a body part, thereby effectively reducing an impact applied to a semiconductor device. CONSTITUTION: A body part(100) includes a vacuum space and a first flowing path. The vacuum space is cylindrical. The first flowing path is connected to the vacuum space. A part of a rod part is inserted into the vacuum space so that the part of the rod part reciprocates. The rod part includes a second flowing path. The second flowing path is connected to the vacuum space. A buffer part(300) is arranged between the end of the rod part and the first flowing path. The buffer part reduces an impact applied to a semiconductor device.
申请公布号 KR101088992(B1) 申请公布日期 2011.12.01
申请号 KR20100065783 申请日期 2010.07.08
申请人 SECRON CO., LTD. 发明人 PARK, CHANG EOK;CHOI, JEONG TAE
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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