发明名称 |
PICKERS |
摘要 |
PURPOSE: A picker device is provided to form a buffer part between a rod part and the first flowing path of a body part, thereby effectively reducing an impact applied to a semiconductor device. CONSTITUTION: A body part(100) includes a vacuum space and a first flowing path. The vacuum space is cylindrical. The first flowing path is connected to the vacuum space. A part of a rod part is inserted into the vacuum space so that the part of the rod part reciprocates. The rod part includes a second flowing path. The second flowing path is connected to the vacuum space. A buffer part(300) is arranged between the end of the rod part and the first flowing path. The buffer part reduces an impact applied to a semiconductor device. |
申请公布号 |
KR101088992(B1) |
申请公布日期 |
2011.12.01 |
申请号 |
KR20100065783 |
申请日期 |
2010.07.08 |
申请人 |
SECRON CO., LTD. |
发明人 |
PARK, CHANG EOK;CHOI, JEONG TAE |
分类号 |
G01R31/26;H01L21/66;H01L21/67 |
主分类号 |
G01R31/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|