| 摘要 |
The present invention relates to a composition comprising a silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one silyl group, and wherein the silyl group comprises at least one —SO3−M+, —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR′SO3−M+, —NR′3+A−, or -Q+A− group. R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl; or arylalkyl group, M+ is a cationic counterion, and A− is a anionic counterion. The present invention further relates to the silane modified metal oxide used in the disclosed chemical mechanical polishing composition. |
