Spin chuck and apparatus using the same,申请号KR20090070262-传众专利搜索

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发明名称	Spin chuck and apparatus using the same
摘要
申请公布号	KR101087791(B1)	申请公布日期	2011.11.30
申请号	KR20090070262	申请日期	2009.07.30
申请人		发明人
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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