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发明名称
ENGINEERING FLAT SURFACES ON MATERIALS DOPED VIA PULSED LASER IRRADIATION
摘要
申请公布号
EP2240955(A4)
申请公布日期
2011.11.30
申请号
EP20090707607
申请日期
2009.02.02
申请人
PRESIDENT AND FELLOWS OF HARVARD COLLEGE
发明人
MAZUR, ERIC;WINKLER, MARK
分类号
H01L31/18;H01L21/223;H01L21/268;H01L31/0288;H01L31/101
主分类号
H01L31/18
代理机构
代理人
主权项
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