发明名称 STRUCTURE AND METHOD FOR MAKING HIGH DENSITY MOSFET CIRCUITS WITH DIFFERENT HEIGHT CONTACT LINES
摘要 <p>Embodiments herein present a structure, method, etc. for making high density MOSFET circuits with different height contact lines. The MOSFET circuits include a contact line, a first gate layer situated proximate the contact line, and at least one subsequent gate layer situated over the first gate layer. The contact line includes a height that is less than a combined height of the first gate layer and the subsequent gate layer(s). The MOSFET circuits further include gate spacers situated proximate the gate layers and a single contact line spacer situated proximate the contact line. The gate spacers are taller and thicker than the contact line spacer.</p>
申请公布号 EP1979941(B1) 申请公布日期 2011.11.30
申请号 EP20070710010 申请日期 2007.01.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU, HUILONG
分类号 H01L23/48;H01L21/768;H01L21/8244;H01L27/11 主分类号 H01L23/48
代理机构 代理人
主权项
地址