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发明名称
COATING-DEVELOPING APPARATUS, COATING-DEVELOPING METHOD AND STORAGE MEDIUM
摘要
申请公布号
KR101087848(B1)
申请公布日期
2011.11.30
申请号
KR20070114321
申请日期
2007.11.09
申请人
发明人
分类号
H01L21/027;B05C11/08;H01L21/677
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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