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发明名称
摘要
申请公布号	JP4826695(B2)	申请公布日期	2011.11.30
申请号	JP20010563938	申请日期	2001.02.22
申请人		发明人
分类号	G02B17/08;G02B13/24;G03F7/20;H01L21/027	主分类号	G02B17/08
代理机构		代理人
主权项
地址

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