| 摘要 |
<p>To solve a problem in that it is difficult to form drive electrodes (11), which are formed respectively on side surfaces of each of partition walls (7), each of the partition walls (7) in a drive region (DR) is made of a piezoelectric material (10) on a top surface side situated above substantially half a height from a bottom surface (12) of each groove (6) to a top surface (13) of each of the partition walls (7), and made of a low-permittivity material (9), which is lower in permittivity than the piezoelectric material (10), on a bottom surface (12) side situated below substantially half the height. Thus, deformation drive amounts of the respective partition walls (7) are equalized, variations in liquid droplet discharge rate among the channels are reduced, and a drive signal is prevented from leaking to the adjacent partition walls (7) and fluctuating the liquid droplet discharge characteristics.</p> |
