FILTERS EMPLOYING POROUS ELECTRODES COATED WITH INSULATING MATERIALS

摘要

PURPOSE: A filter employing porous electrodes are provided to prevent the intensity of an electric field from being reduced on the surface of the electrodes by partially coating the surface of the electrode based on insulating materials. CONSTITUTION: A dielectric filtering material(100) of a dielectric constant between 1.1 and 20 collects fine particles from processing gas. Porous electrodes(210) are formed on both sides of the dielectric filtering material and are coated with 5-99% of insulating materials. A power source applies a voltage to the porous electrodes to electrically polarize and static-electrically activate the dielectric material. Conductive layers(220) are formed on both sides of the dielectric filtering material. If a conductive layer is formed on one side of the dielectric filtering material, the porous electrode is formed on the rear side of the conductive layer.