发明名称 Semiconductor testing method and semiconductor tester
摘要 A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.
申请公布号 US8067752(B2) 申请公布日期 2011.11.29
申请号 US20100764992 申请日期 2010.04.22
申请人 ANDO TOHRU;NARA YASUHIKO;SAITO TSUTOMU;KATO SHINICHI;SUNAOSHI TAKESHI;HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 ANDO TOHRU;NARA YASUHIKO;SAITO TSUTOMU;KATO SHINICHI;SUNAOSHI TAKESHI
分类号 H01J49/00;G06K9/00;G06K9/62 主分类号 H01J49/00
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