ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PURPOSE: An electronic device and a manufacturing method thereof are provided to improve a signal transmission property by reducing a signal leakage at a high frequency domain. CONSTITUTION: A semiconductor substrate includes a hollow(30) which is extended in a thickness direction. An insulator filling layer(3) is an annular layer to cover the inner surface of the hollow. A following conductor(2) is made of congealed metal filled in an area(20) surrounded by the insulator filling layer. The insulator filling layer has an organic insulator, an inorganic insulator and ceramic of a nano composite structure. The relative dielectric constant of the ceramic of the nano composite structure is 4 to 9.