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发明名称
ETCHING DEVICE AND ETCHING METHOD
摘要
申请公布号
KR20110128340(A)
申请公布日期
2011.11.29
申请号
KR20117023865
申请日期
2010.02.26
申请人
MITSUBISHI PAPER MILLS LTD.
发明人
KATO MAKOTO;YAMANE KENGO;ISHIDA MARIKO
分类号
C23F1/08;H05K3/06
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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