发明名称 |
Method for creating a magnetic write pole having a stepped perpendicular pole via CMP-assisted liftoff |
摘要 |
A method for manufacturing a magnetic write head having a stepped, recessed, high magnetic moment pole connected with a write pole. The stepped pole structure helps to channel magnetic flux to the write pole without leaking write field to the magnetic medium. This allows the write head to maintain a high write field strength at very small bit sizes. The method includes depositing a dielectric layer and a first CMP layer over substrate that can include a magnetic shaping layer. A mask is formed over the dielectric layer, the mask having an opening to define the stepped pole structure. The image of the mask is transferred into the dielectric layer. A high magnetic moment material is deposited and a chemical mechanical polishing is performed to planarize the magnetic material and dielectric layer. |
申请公布号 |
US8066893(B2) |
申请公布日期 |
2011.11.29 |
申请号 |
US20080343044 |
申请日期 |
2008.12.23 |
申请人 |
BAER AMANDA;HSIAO WEN-CHIEN DAVID;KIM JOHN I.;LIU YINSHI;NIKITIN VLADIMIR;OLSON TREVOR W.;SOUGRATI HICHAM MOULAY;YAO YUAN;HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
BAER AMANDA;HSIAO WEN-CHIEN DAVID;KIM JOHN I.;LIU YINSHI;NIKITIN VLADIMIR;OLSON TREVOR W.;SOUGRATI HICHAM MOULAY;YAO YUAN |
分类号 |
B44C1/22;B23P15/00 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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