发明名称 |
Multi-workpiece processing chamber |
摘要 |
A multi-workpiece chamber includes at least two processing stations, for exposing workpieces to a treatment process. A partition cooperates with the chamber such that the partition is disengagably removable from the chamber and re-engagable with the chamber for selectively dividing the processing stations. The partition is configured to provide for non-line-of-sight travel of certain ones of the process related products between the processing stations. An exhaust arrangement divides exhaust flow into at least two approximately equal exhaust flow portions that leave the multi-workpiece chamber in a way which enhances uniformity of the treatment process for the stations. A partition configuration is described including a partition portion between the stations and a baffle portion extending into an exhaust arrangement. A modified partition arrangement is provided for use in establishing a modified exchange characteristic of the process related products. |
申请公布号 |
US8066815(B2) |
申请公布日期 |
2011.11.29 |
申请号 |
US20070839527 |
申请日期 |
2007.08.15 |
申请人 |
DEVINE DANIEL J.;GEORGE RENE;QIN CE;DESAI DIXIT;MATTSON TECHNOLOGY, INC. |
发明人 |
DEVINE DANIEL J.;GEORGE RENE;QIN CE;DESAI DIXIT |
分类号 |
C23C16/00;C23F1/00;H01L21/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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