| 发明名称 |
LOW MICROPIPE 100 MM SILICON CARBIDE WAFER |
| 摘要 |
A high quality single crystal wafer of SiC is disclosed having a diameter of at least about 100mm and a micropipe density of less than about 25 cm-2. |
| 申请公布号 |
CA2581856(C) |
申请公布日期 |
2011.11.29 |
| 申请号 |
CA20052581856 |
申请日期 |
2005.09.27 |
| 申请人 |
CREE, INC. |
发明人 |
POWELL, ADRIAN;BRADY, MARK;LEONARD, ROBERT TYLER |
| 分类号 |
C30B29/36;C30B23/00;C30B33/10 |
主分类号 |
C30B29/36 |
| 代理机构 |
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代理人 |
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