APPARTUS FOR APPPLYING LIGHTING ENERGY ON OBJECT AND METHOD FOR OPERATING THE SAME

摘要

PURPOSE: An optical energy irradiation apparatus and an operating method thereof are provided to control the level of energy which is added to an object by controlling an energy irradiation area about the object. CONSTITUTION: A lamp is light-emitted by discharge in order to irradiate optical energy to an object having a substrate. A power supply unit(200) is connected to the lamp and charges power for discharge in the lamp. A transfer unit(300) transfers one of the lamp and the object. A control unit(400) controls the power supply unit so that the lamp is light-emitted. The control unit controls the transfer unit so that the object is relatively transferred about the lamp before and after light radiation.