WAFER TRANSFER MACHINE AND WAFER TRANSFER METHOD USING THE SAME

摘要

PURPOSE: A wafer transfer apparatus and a transfer method are provided to accurately arrange wafers in each picking up position by transferring thin wafers in a state in which the thin wafers is adsorbed and fixed by vacuum. CONSTITUTION: A position awareness unit recognizes the position of a wafer and compares with the existing position. A position control unit(400) adjusts the position of the wafer. A conveying unit adsorbs the wafer by vacuum and transfers the wafers to picking up position. A wafer alignment unit arrays the wafers which are transferred to the picking up position. The position control unit comprises a positioning member(410) and an actuator(420). The positioning member comprises a positioning groove in which the wafer is inserted and the position of the wafer is adjusted.