SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

摘要

PURPOSE: A substrate processing apparatus and method are provided to accomplish high throughput while downsizing a footprint. CONSTITUTION: A substrate processing apparatus(10) has a case(12) and an opening is formed in the front side of the case. A cassette receiving stage is installed in the external lower side of the opening. A cassette loader is installed to face with the opening. First and second scalar arms(58, 60) send back two boats. A boat holder(46) is able to move to the lower side of a reaction path(52) and mounts the boat. A first arm supports a boat mount part in order to rotate. A second arm supports the first arm in order to rotate.