Gas Providing Plate for Plasma Generation and Apparatus for Generating plasma,申请号KR20090118161-传众专利搜索

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发明名称	Gas Providing Plate for Plasma Generation and Apparatus for Generating plasma
摘要
申请公布号	KR101087491(B1)	申请公布日期	2011.11.28
申请号	KR20090118161	申请日期	2009.12.02
申请人		发明人
分类号	H01L21/205;H01L21/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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