发明名称 SOLUTION ET PROCEDE D'ACTIVATION DE LA SURFACE OXYDEE D'UN SUBSTRAT SEMI-CONDUCTEUR.
摘要 The present invention relates to a solution and a method for activating the oxidized surface of a substrate, in particular of a semiconducting substrate, for its subsequent coating by a metal layer deposited by the electroless method. According to the invention, this composition contains: A) an activator consisting of one or more palladium complexes; B) a bifunctional organic binder consisting one or more organosilane complexes; C) a solvent system consisting one or more solvents for solubilizing the said activator and the said binder.
申请公布号 FR2950633(B1) 申请公布日期 2011.11.25
申请号 FR20090056800 申请日期 2009.09.30
申请人 ALCHIMER 发明人 MEVELLEC VINCENT;SUHR DOMINIQUE
分类号 C23C22/78;C23C22/02;H01L21/48;H01L23/52 主分类号 C23C22/78
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