| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coordinate measuring system having a high speed and little oscillation and measurement error. <P>SOLUTION: An analog scanning probe 120 with a connector detachably connected to a movable support of a coordinate measuring system includes a contact portion 30 at the edge of a needle portion 28 rotatably connected with the scanning probe along a measurement axis 63 and a positional encoder for performing the measurement of inclined angle of the contact portion 30 about the measurement axis 63. A joint 64 is provided between the connector and the measurement axis 63 which enables the scanning of the probe by inclining the scanning probe or a part of the probe. <P>COPYRIGHT: (C)2012,JPO&INPIT |
