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发明名称
摘要
申请公布号	JP4821069(B2)	申请公布日期	2011.11.24
申请号	JP20010246090	申请日期	2001.08.14
申请人		发明人
分类号	C23C16/42;H01L21/205;H01L21/28;H01L21/285	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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