发明名称 APPARATUS AND METHOD FOR MANUFACTURING SINGLE CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a single crystal, which can stably detect the temperature of a heater even if work conditions are changed, and thereby, can stably control the temperature and the output of the heater, and can perform stable work, and to provide a method for manufacturing a single crystal. <P>SOLUTION: The apparatus 10 for manufacturing a single crystal includes at least: a chamber 11 for accommodating a crucible 13 which retains a molten raw material; a lifting mechanism 16 for lifting a single crystal; a vertically movable heater 12 for heating the raw material; and a temperature detecting means 14 for detecting the temperature of the heater 12, wherein the temperature detecting means 14 can be vertically moved in accordance with the vertical movement of the heater 12. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011236092(A) 申请公布日期 2011.11.24
申请号 JP20100109993 申请日期 2010.05.12
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 KITAGAWA MASANORI;IWASAKI ATSUSHI;OTSUNA HIROSHI
分类号 C30B15/20 主分类号 C30B15/20
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