| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device, a system and a method for detecting a sealing part, in which the sealing part and a melt-sealing boundary part of an ampoule can be easily and surely detected. <P>SOLUTION: A system 100 for inspecting a melt-sealing boundary part includes an image processing device 1 and is constituted of an ampoule 2; an ampoule arrangement device 3; an ampoule supply device 4; a camera 5 arranged on a center line 8B of the ampoule; a ring-shaped illumination 6; and an imaging processor 7. In the ampoule arrangement device 3, the ampoule 2 is arranged so that a branch tip 2A of the ampoule 2 is positioned on the center line of a ring-shaped illumination 5 against the ring-shaped illumination 5 equipped with a horizontal surface 5B having a gap with a horizontal surface 2B. Then, the sealing part 2C of the ampoule 2 is imaged by irregular reflection due to a melt-sealing boundary part 2D, based on horizontal irradiation light 9 irradiated to the sealing part 2C by the imaging processor 7, and a picked-up image 20 about the sealing part 2C and the melt-sealing boundary part 2D is obtained by the image processing device 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
